2g tri - axis accelerometer specifications part number: kxr94 - 2283 rev. - july 2009 page 1 of 9 product description the kxr94 - 2283 is a tri - axis, silicon micromachined accelerometer with a full - scale output range of 2g (19.6m/s 2 ). the sense element is fabricated using kionix?s proprietary plasma micromachining process technology. acceleration sensi ng is based on the principle of a differential capacitance arising from acceleration - induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. the sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. a separate asic device packaged with the sense element provides signal conditioning and self - test. the accelerometer is delivere d in a 5 x 5 x 1.2 mm dfn plastic package operating from a 2.5 ? 5.25v dc supply. the three outputs (x, y, z) are provided on three analog output pins. the kxr94 also features an integrated 4 - channel multiplexer (x, y, z, aux in). the enable pin must be h igh for normal operation and low for power shutdown. functional diagram c 2 c 3 32k x sensor charge amplifier oscillator 10 2 self test output x enable vdd gnd 3 8 gnd 12 y sensor charge amplifier 32k output y z sensor charge amplifier 32k output z 13 vmux 5 aux in 9 nc s 0 s 1 4 6 7 11 logic c 4 1 khz lpf temp sensor mux 14
2g tri - axis accelerometer specifications part number: kxr94 - 2283 rev. - july 2009 page 2 of 9 product specifications table 1. mechanical (specifications are for operation at v dd = 5.0 v and t = 25o c unless stated otherwise) p arameters units min typical max operating temperature range o c -40 - 85 zero - g offset v 2.42 2.50 2.58 zero - g offset variation from rt over temp. mg/ o c 0.2 sensitivity mv/g 970 1000 1030 sensitivity variation from rt over temp. %/ o c 0.01 (xy ) 0.02 (z) offset ratiometric error (v dd = 5.0v 5%) mg 4 sensitivity ratiometric error (v dd = 5.0v 5%) % 1.25 (xy) 0.20 (z) non - linearity % of fs 0.1 cross axis sensitivity % 2.0 self test output change on activation g 4.4 (xy) 1.25 (z) bandwidth ( - 3db) 1 hz 800 noise density (on filter pins) g / hz 45 notes: 1. internal 1 khz low pass filter. lower frequencies are user definable with external capacitors. table 2. electrical (specifications are for operation at v dd = 5.0 v and t = 25o c unless stated otherwise) para meters units min typical max supply voltage (v dd ) operating v 2.5 5.0 5.25 current consumption operating ma 0.50 0.95 1.40 standby a - - 5 analog output resistance(r out ) k ? 24 32 40 input low voltage v - - 0.2 * v io input high voltage v 0.8 * v io - - multiplexer response time s 4.5 power up time 1 ms 1 notes: 1. power up time can also be determined by 5 times the rc time constant of the optional user defined low pass filter.
2g tri - axis accelerometer specifications part number: kxr94 - 2283 rev. - july 2009 page 3 of 9 table 3. environmental parameters units min target max supply voltage (v dd ) absolute limits v - 0.3 - 7.0 maximum operating temperature range o c -40 - 125 storage temperature range o c -55 - 150 mech. shock (powered and unpowered) g - - 5000 for 0.5ms esd hbm v - - 3000 caution: esd s ensitive and mechanical shock sensitive component, improper handling can cause permanent damage to the device. the lga plastic package conforms to european union directive 2002/95/ec on the restriction of the use of certain hazardous substances in ele ctrical and electronic equipment (rohs). soldering soldering recommendations available upon request or from www.kionix.com .
2g tri - axis accelerometer specifications part number: kxr94 - 2283 rev. - july 2009 page 4 of 9 application schematic c 4 14 13 12 11 10 9 8 1 2 3 4 5 6 7 c 2 c 3 kxr 94 vdd c 1 vmux s 0 s 1 st enable x z y aux in table 4. kxr94 pad descriptio ns pad name description 1 nc not connected internally (can be connected to vdd or gnd) 2 x output analog output of the x - channel. optionally, a capacitor (c 2 ) placed between this pin and ground will form a low pass filter. 3 gnd ground 4 aux in aux iliary input for multiplexer. connect to vdd or ground if not used. 5 vmux multiplexed analog output. do not connect if multiplexer is not used. 6 s0 mux selector 0 (see output select table). connect to vdd or ground if not used. 7 s1 mux selector 1 (see output select table). connect to vdd or ground if not used. 8 vdd the power supply input. decouple this pin to ground with a 0.1uf ceramic capacitor (c 1 ). 9 enable enable: high - normal operation; low - device is in standby, power down mode 10 st self test: low ? normal operation; high ? device is in self - test mode 11 nc not connected internally (can be connected to vdd or gnd) 12 gnd ground 13 y output analog output of y - channel. optionally, a capacitor (c 3 )placed between this pin and ground w ill form a low pass filter. 14 z output analog output of z - channel. optionally, a capacitor (c 4 ) placed between this pin and ground will form a low pass filter. center pad ground
2g tri - axis accelerometer specifications part number: kxr94 - 2283 rev. - july 2009 page 5 of 9 application design equations 1. the bandwidth is determined by the int ernal 1khz low pass filter. the user can lower the bandwidth by placing filter capacitors connected from pins 2, 13 and 14 to ground. the response is single pole. given a desired bandwidth, f bw , the filter capacitors are determined by: bw f x c c c 6 4 3 2 10 97 . 4 ? = = = 2. when using not using the multiplexer, the kxr94 is a pin - compatible replacement for kionix?s kxm52 series of accelerometers. the following application schematic should be used: pin 4 (aux in) = ground pin 5 (vmux) = do not connect pin 6 (s0 ) = ground pin 7 (s1) = ground c 4 14 13 12 11 10 9 8 1 2 3 4 5 6 7 c 2 c 3 kxr 94 vdd c 1 st enable x y z 3. when not connecting the self test pin to a digital i/o port of a microcontroller, kionix recommends connecting the self test pin to ground.
2g tri - axis accelerometer specifications part number: kxr94 - 2283 rev. - july 2009 page 6 of 9 using the multiplexed output of the kxr94 multiplexer data select the kxr94 features an integrated 4 - channel multiplexer. this feature reduces system mcu requirements to only 1 adc and 2 digital i/o?s. the kxr94 uses two select inputs (s0, s1) to control the data flow from vmux. when a micr oprocessor toggles the select inputs, the desired output is attained based on the select table. note that logic 0 is gnd and logic 1 is vdd. output select table data sampling rat e when operating in its multiplexed mode, the kxr94 has the ability to achieve very high data sampling rates. internally, the sensor elements (x, y, and z) are sequentially sampled in a ?round robin? fashion at a rate of 32khz per axis. note that this is a differential capacitance sampling of each sensor element, which stores an analog voltage on the filter cap for each axis. combine this high sensor element sampling rate with the short 5s settling time of the integrated multiplexer, and the user can achie ve a performance very close to that of the 3 separate analog outputs. this is more than sufficient to eliminate any aliasing in the final application since the kxr94 will be operating with a typical bandwidth of ~50hz and a maximum of 1000hz. s1 s0 vmux 0 0 x output 0 1 z output 1 0 y output 1 1 aux. in
2g tri - axis accelerometer specifications part number: kxr94 - 2283 rev. - july 2009 page 7 of 9 test specifications ! special characteristics: these characteristics have been identified as being critical to th e customer. every part is tested to verify its conformance to specification prior to shipment. table 5. test specifications parameter frequency test conditions zero - g offset @ rt 100% 25o c, v dd = 5.0v sensitivity @ rt 100% 25o c, v dd = 5.0v curre nt consumption operating 100% 25o c, v dd = 5.0v
2g tri - axis accelerometer specifications part number: kxr94 - 2283 rev. - july 2009 page 8 of 9 +x +x +y +z +z package dimensions and orientation 5 x 5 x 1.2 mm dfn all dimensions and tolerances conform to asme y14.5m - 1994 dimension mm inch min nom max min nom max a 5.00 0.197 b 5.00 0.197 c 1.10 1.20 1.30 0.043 0.047 0.051 d 0.18 0.23 0.28 0.007 0.009 0 .011 e 0.50 0.020 f 0.35 0.40 0.45 0.014 0.016 0.018 g 3.50 3.60 3.70 0.138 0.142 0.146 h 4.20 4.30 4.40 0.165 0.169 0.173
2g tri - axis accelerometer specifications part number: kxr94 - 2283 rev. - july 2009 page 9 of 9 static x/y/z output response versus orientation t o earth?s surface (1g): position 1 2 3 4 5 6 diagram top bottom bottom top x 2.5 v 3.5 v 2.5 v 1.5 v 2.5 v 2.5 v y 3.5 v 2.5 v 1.5 v 2.5 v 2.5 v 2.5 v z 2.5 v 2.5 v 2.5 v 2.5 v 3.5 v 1.5 v x - polarity 0 + 0 - 0 0 y - polarity + 0 - 0 0 0 z - polarity 0 0 0 0 + - (1g) earth?s surface
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